- Author
- Anderson, M.
- Title
- Protecting Wet Chemistry Work Stations Against Fire.
- Book or Conf
- American Institute of Chemical Engineers. Summer National Meeting. 1988, New York, 1-4 p., 1988
- Keywords
- chemistry | fire hazards | semiconductors | silicon | water | manufacturing
- Identifiers
- photolithography; etching; junction formation; deposition; metallization