- Author
-
Wu, P. K. S.
|
Chaffee, J. L.
|
Peterkin, H.
- Title
- Fire Hazards of Wafer Carriers in Clean Room Environment.
- Coporate
- FM Global Research, USA
- Distribution
- FOR MORE INFORMATION CONTACT: Interscience Communications Limited, West Yard House, Guildford Grove, Greenwich London, SE10 8JT, England. Telephone: +44 (0)20 8692 5050, Fax: +44 (0)20 8692 5155, Email: intercomm@dial.pipex.com, Website: http://www.intercomm.dial.pipex.com
- Book or Conf
- Fire and Materials 2003. 8th International Conference. Conference Papers. Proceedings. Organised by Interscience Communications Limited. January 27-28, 2003,
San Francisco, CA,
117-129 p.,
2003
- Keywords
-
fire hazards
|
small scale fire tests
|
free burning fires
|
large scale fire tests
- Identifiers
- 300-mm wafer carriers designated as Front Opening Unified Pod (FOUP); polyvinylidene fluoride (PVDF); free-burn fire tests; parallel panel fire tests