- Author
-
Tewarson, A.
- Title
- Clean Room Process Compatibility of Polymeric Materials for the Semiconductor Industry.
- Coporate
- FM Global Research, Norwood, MA
- Journal
-
Journal of Fire Sciences,
Vol. 21,
No. 5,
397-413,
September 2003
- Keywords
-
clean room fires
|
compatibility
|
outgassing
- Identifiers
- 4910 materials; leaching; extraction; Semiconductor industry