- Author
-
Shu, Y. L.
|
Jen, W. J.
|
Chiu, C. W.
|
Chen, C. H.
- Title
- Assessment of Fire Protection Performance of Water Mist Applied in Exhaust Ducts for Semiconductor Fabrication Process.
- Coporate
- Chungtai Institute of Health Sciences and Technology, Taichung, Taiwan
Au Optronics Poration, HsinChu, Taiwan
National Chiao Tung Univ., HsinChu, Taiwan
- Journal
-
Fire and Materials,
Vol. 29,
No. 5,
295-302,
September/October 2005
- Keywords
-
water mist
|
fire protection
|
ducts
|
semiconductors
|
fire tests
|
exhaust pipes
|
nozzles
|
air flow
|
pressure
|
sprinkler systems
|
field tests
|
temperature
- Identifiers
- exhaust duct; fume exhause pipes