- Author
-
Foreman, R. A.
|
Bell, M. I.
|
Mayo, S.
|
Kahn, A. H.
- Title
- Effect of Spatial Averaging on the Compositional Analysis of Crystals by Absorption Spectroscopy.
- Coporate
- National Bureau of Standards, Gaithersburg, MD
- Journal
-
Journal of Applied Physics,
Vol. 55,
No. 2,
547-554,
January 15, 1984
- Keywords
-
spectroscopy
- Abstract
- Calculations of optical absorption based on a model of a higher crystal containing spatially periodic compositional variations are presented. These variations can contribute a significant source of systematic error in the analysis of composition by optical or surface techniques. The model is most appropriate for melt-grown crystals and in particular for striated semiconductor crystals, and the surface concentration profile which it predicts is confirmed by comparison with a published x-ray topographic study of silicon. Implications of the results for optical absorption studies of impurities in silicon crystals are discussed, and it is shown that significant measurement errors may occur.