FireDOC Search
Author
Anderson, M.
Title
Protecting Wet Chemistry Work Stations Against Fire.
Book or Conf
American Institute of Chemical Engineers. Summer National Meeting. 1988, New York, 1-4 p., 1988
Keywords
chemistry
|
fire hazards
|
semiconductors
|
silicon
|
water
|
manufacturing
Identifiers
photolithography; etching; junction formation; deposition; metallization