- Author
-
Heunisch, G. W.
- Title
- Analysis of Thermal Decomposition of Tetraethoxysilane by Gas Chromatography. Research and Development Technical Report.
- Coporate
- Army Electronics Command, Fort Monmouth, NJ
- Report
-
ECOM-2993,
July 1968,
14 p.
- Distribution
- Available from National Technical Information Service
- Keywords
-
gas chromatography
|
thermal decomposition
|
integrated circuits
|
silicon oxides
- Identifiers
- gas-liquid chromatography; thin films