- Author
-
Wald, P. H.
|
Becker, C. E.
- Title
- Toxic Gases Used in the Microelectronics Industry.
- Coporate
- Northern California Occupational Health Center, San Francisco
- Journal
-
State of the Art Review: Occupational Medicine,
Vol. 1,
No. 1,
105-107,
January/March 1986
- Keywords
-
toxic gases
|
hydrogen chloride
|
ammonia
|
diborane
- Identifiers
- noxious gases; silane; phosphine; arsine