- Author
-
Steppan, D. R.
- Title
- Combustibility of Plastics Used in Semiconductor Tool Construction.
- Coporate
- Underwriters Laboratories, Inc., Northbrook, IL
- Book or Conf
- New Developments and Key Market Trends in Flame Retardancy. Fall Conference. Proceedings. Fire Retardant Chemicals Association. October 15-18, 2000,
Fire Retardant Chemicals Assoc., Lancaster, PA,
Ponte Vedra, FL,
109-151 p.,
2000
- Keywords
-
flame retardants
|
plastics
|
combustibility
|
semiconductor devices
|
construction
|
test methods
|
cone calorimeters
|
heat flux
|
heat release rate
|
flame propagation
- Identifiers
- semi-conductor tools: wet bench, aligner, FOUP (Front Opening Universal Pod),; smoke generation