- Author
- Steppan, D. R.
- Title
- Combustibility of Plastics Used in Semiconductor Tool Construction.
- Coporate
- Underwriters Laboratories, Inc., Northbrook, IL
- Book or Conf
- New Developments and Key Market Trends in Flame Retardancy. Fall Conference. Proceedings. Fire Retardant Chemicals Association. October 15-18, 2000, Fire Retardant Chemicals Assoc., Lancaster, PA, Ponte Vedra, FL, 109-151 p., 2000
- Keywords
- flame retardants | plastics | combustibility | semiconductor devices | construction | test methods | cone calorimeters | heat flux | heat release rate | flame propagation
- Identifiers
- semi-conductor tools: wet bench, aligner, FOUP (Front Opening Universal Pod),; smoke generation