- Author
- Wald, P. H. | Becker, C. E.
- Title
- Toxic Gases Used in the Microelectronics Industry.
- Coporate
- Northern California Occupational Health Center, San Francisco
- Journal
- State of the Art Review: Occupational Medicine, Vol. 1, No. 1, 105-107, January/March 1986
- Keywords
- toxic gases | hydrogen chloride | ammonia | diborane
- Identifiers
- noxious gases; silane; phosphine; arsine