- Author
-
Babushok, V. I.
|
Tsang, W.
- Title
- Inhibition of Silane Ignition by Iodine Containing Additives.
- Coporate
- National Institute of Standards and Technology, Gaithersburg, MD
- Report
-
NISTIR 6242,
October 1998,
- Distribution
- Available from National Technical Information Service
- Book or Conf
- National Institute of Standards and Technology. Annual Conference on Fire Research: Book of Abstracts. November 2-5, 1998,
Gaithersburg, MD,
Beall, K. A., Editors,
125-126 p.,
1998
- Keywords
-
fire research
|
fire science
|
fire suppression
|
additives
|
silanes
|
iodine
- Abstract
- Silane is widely used in CVD processing in the semiconductor industry. The highly explosive nature of SiH4-O2 mixtures represents a serious safety problem. In this paper we report the results of numerical studies on the influence of iodine and hydrogen iodide additives on silane self-ignition limits. Previous studies of influence of different additives on silane combustion are summarized.