- Author
- Ohtani, H.
- Title
- Combustion Behavior of Gases for Semiconductor Production.
- Coporate
- Yokohama National Univ., Japan
- Book or Conf
- Science University of Tokyo, Japan. '93 Asian Fire Seminar. October 7-9, 1993, Tokyo, Japan, 59-65 p., 1993
- Keywords
- fire research | semiconductors | combustion gases | silanes | flammable gases | pressure | injection | reaction kinetics