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Author: Ohtani, H.
Title: Combustion Behavior of Gases for Semiconductor Production.
Coporate: Yokohama National Univ., Japan
Book or Conf: Science University of Tokyo, Japan. '93 Asian Fire Seminar. October 7-9, 1993, Tokyo, Japan, 59-65 p., 1993
Keywords: fire research | semiconductors | combustion gases | silanes | flammable gases | pressure | injection | reaction kinetics