- Author
- Wu, P. K. S. | Chaffee, J. L. | Peterkin, H.
- Title
- Fire Hazards of Wafer Carriers in Clean Room Environment.
- Coporate
- FM Global Research, USA
- Distribution
- FOR MORE INFORMATION CONTACT: Interscience Communications Limited, West Yard House, Guildford Grove, Greenwich London, SE10 8JT, England. Telephone: +44 (0)20 8692 5050, Fax: +44 (0)20 8692 5155, Email: intercomm@dial.pipex.com, Website: http://www.intercomm.dial.pipex.com
- Book or Conf
- Fire and Materials 2003. 8th International Conference. Conference Papers. Proceedings. Organised by Interscience Communications Limited. January 27-28, 2003, San Francisco, CA, 117-129 p., 2003
- Keywords
- fire hazards | small scale fire tests | free burning fires | large scale fire tests
- Identifiers
- 300-mm wafer carriers designated as Front Opening Unified Pod (FOUP); polyvinylidene fluoride (PVDF); free-burn fire tests; parallel panel fire tests