- Author
- Foreman, R. A. | Bell, M. I. | Mayo, S. | Kahn, A. H.
- Title
- Effect of Spatial Averaging on the Compositional Analysis of Crystals by Absorption Spectroscopy.
- Coporate
- National Bureau of Standards, Gaithersburg, MD
- Journal
- Journal of Applied Physics, Vol. 55, No. 2, 547-554, January 15, 1984
- Keywords
- spectroscopy
- Abstract
- Calculations of optical absorption based on a model of a higher crystal containing spatially periodic compositional variations are presented. These variations can contribute a significant source of systematic error in the analysis of composition by optical or surface techniques. The model is most appropriate for melt-grown crystals and in particular for striated semiconductor crystals, and the surface concentration profile which it predicts is confirmed by comparison with a published x-ray topographic study of silicon. Implications of the results for optical absorption studies of impurities in silicon crystals are discussed, and it is shown that significant measurement errors may occur.