- Author
- Okayama, Y. | Hotta, H.
- Title
- Composite Type Silane Sensor.
- Keywords
- sensors
- Abstract
- [ABSTRACT IN ENGLISH] A silane gas sensor was developed to detect both combustible and non-combustible components. An ionization sensor, best able to detect combustible components, and a semi-conductor type sensor, able to detect gaseous SiH4 were combined. This model was effective in tests on all three SiH4 states.