- Author
- Fogarty, K.
- Title
- Responding to Semiconductor Facilities.
- Coporate
- IBM East Fishkill, Hopewell Junction, NY
- Journal
- Fire Engineering, Vol. 147, No. 11, 46-48, November 1994
- Keywords
- semiconductors | hazardous materials | toxic gases | fire departments | response time
- Identifiers
- cryogenic gases