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Author: Yashar, D. A. | Domanski, P. A.
Title: MEMS Sensors for HVAC&R: Small, Fast, Cheap.
Coporate: National Institute of Standards and Technology, Gaithersburg, MD
Journal: ASHRAE Journal, 69-74, May 2004
Keywords: sensors | costs | viscosity | flow velocity | pressure drop
Identifiers: Microelectronic Mechanical Systems (MEMS)