- Author
- Yashar, D. A. | Domanski, P. A.
- Title
- MEMS Sensors for HVAC&R: Small, Fast, Cheap.
- Coporate
- National Institute of Standards and Technology, Gaithersburg, MD
- Journal
- ASHRAE Journal, 69-74, May 2004
- Keywords
- sensors | costs | viscosity | flow velocity | pressure drop
- Identifiers
- Microelectronic Mechanical Systems (MEMS)