- Author
- Heunisch, G. W.
- Title
- Analysis of Thermal Decomposition of Tetraethoxysilane by Gas Chromatography. Research and Development Technical Report.
- Coporate
- Army Electronics Command, Fort Monmouth, NJ
- Report
- ECOM-2993, July 1968, 14 p.
- Distribution
- Available from National Technical Information Service
- Keywords
- gas chromatography | thermal decomposition | integrated circuits | silicon oxides
- Identifiers
- gas-liquid chromatography; thin films