- Author
- Tewarson, A.
- Title
- Clean Room Process Compatibility of Polymeric Materials for the Semiconductor Industry.
- Coporate
- FM Global Research, Norwood, MA
- Journal
- Journal of Fire Sciences, Vol. 21, No. 5, 397-413, September 2003
- Keywords
- clean room fires | compatibility | outgassing
- Identifiers
- 4910 materials; leaching; extraction; Semiconductor industry