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Polarization of Light Scattered by Particles on Silicon Wafers.
National Institute of Standards and Technology, Gaithersburg, MD; Maryland Univ., College Park
Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays. Proceedings. SPIE Proceedings Series Volume 3619. Society of Photyo-Optical Instrumentation Engineers (SPIE). January 28, 1999,
Society of Photo-Optical Instrumentation Engineers, Bellingham, WA,
San Jose, CA,
80-89 p.,
1999
Sung, L. P.; Mulholland, G. W.; Germer, T. A.
view article (9.580606)
Polarized Light-Scattering Measurements of Dielectric Spheres Upon a Silicon Surface.
Maryland Univ., College Park; National Institute of Standards and Technology, Gaithersburg, MD
Optics Letters,
Vol. 24,
No. 13,
866-868,
July 1, 1999
Air-Conditioning and Refrigeration Technology Institute, Arlington, VA,