displaying 1 - 2 results in total 2
Sung, L. P.; Mulholland, G. W.; Germer, T. A.
view article (1.0)Polarization of Light Scattered by Particles on Silicon Wafers.National Institute of Standards and Technology, Gaithersburg, MD; Maryland Univ., College ParkSurface Characterization for Computer Disks, Wafers, and Flat Panel Displays. Proceedings. SPIE Proceedings Series Volume 3619. Society of Photyo-Optical Instrumentation Engineers (SPIE). January 28, 1999, Society of Photo-Optical Instrumentation Engineers, Bellingham, WA, San Jose, CA, 80-89 p., 1999Sung, L. P.; Mulholland, G. W.; Germer, T. A.
view article (1.0)Polarized Light-Scattering Measurements of Dielectric Spheres Upon a Silicon Surface.Maryland Univ., College Park; National Institute of Standards and Technology, Gaithersburg, MDOptics Letters, Vol. 24, No. 13, 866-868, July 1, 1999Air-Conditioning and Refrigeration Technology Institute, Arlington, VA,