Mulholland, G. W.; Fernandez, M. G.
view article (10.004545)
Accurate Size Measurement of Monosize Calibration Spheres by Differential Mobility Analysis.
National Institute of Standards and Technology, Gaithersburg, MD
Characterization and Metrology for ULSI Technology. International Conference, 1998. CP449. Proceedings. March 1998,
American Institute of Physics,
Gaithersburg, MD,
Seiler, D. G.; Diebold, A. C.; Bullis, W. M.; Shaffner, T. J.; McDonald, R.; Walters, E. J., Editors,
819-823 p.,
1998