Sung, L. P.; Mulholland, G. W.; Germer, T. A.
view article (9.986072)
Polarization of Light Scattered by Particles on Silicon Wafers.
National Institute of Standards and Technology, Gaithersburg, MD; Maryland Univ., College Park
Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays. Proceedings. SPIE Proceedings Series Volume 3619. Society of Photyo-Optical Instrumentation Engineers (SPIE). January 28, 1999,
Society of Photo-Optical Instrumentation Engineers, Bellingham, WA,
San Jose, CA,
80-89 p.,
1999