FireDOC Search

displaying 1 - 1 results in total 1

• Rawie, C. C.
  view article (9.992496)

  Benefits and Costs of Improved Measurements: The Case of Integrated-Circuit Photomask Linewidths. Final Report.
  National Bureau of Standards, Washington, DC
  NBSIR 82-2458, May 1982, 83 p.