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Mulholland, G. W.; Bryner, N. P.; Liggett, W.; Scheer, B. W.; Goodall, R. K.
view article (1.0)Selection of Calibration Particles for Scanning Surface Inspection Systems.National Institute of Standards and Technology, Gaithersburg, MD; VLSI Standards, Inc., San Jose, CA; International 300 mm Initiative, Austin, TXFlatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays. International Society for Optical Engineering (SPIE). Proceedings. Volume 2862. August 8-9, 1996, Society of Photo-Optical Instrument Engineers, WA, Denver, CO, 104-118 p., 1996