- Author
- Choi, M. | Baum, H. R. | Greif, R.
- Title
- Heat Transfer Problem for the Modified Chemical Vapor Deposition Process.
- Coporate
- California Univ., Berkeley National Bureau of Standards, Gaithersburg, MD
- Journal
- Journal of Heat Transfer, Vol. 109, No. 3, 642-646, August 1987
- Keywords
- heat transfer | temperature | vapors
- Identifiers
- heat transfer
- Abstract
- The heat transfer problem to the modified chemical vapor deposition process has been analyzed in the high Peclet number limit. Variations in the axial angular, and radial directions are presented. Of particular interest are the effects of tube rotation and variable properties on the temperature profiels.