Yashar, D. A.; Domanski, P. A.; DeVoe, D. L.
view article (10.004545)
Microfabricated Flow Controller for Refrigerant Expansion.
National Institute of Standards and Technology, Gaithersburg, MD; Maryland Univ., College Park
Journal of Microelectromechanical Systems,
Vol. 16,
No. 5,
1106-1112,
October 2007