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Yashar, D. A.; Domanski, P. A.; DeVoe, D. L.
view article (1.0)Microfabricated Flow Controller for Refrigerant Expansion.National Institute of Standards and Technology, Gaithersburg, MD; Maryland Univ., College ParkJournal of Microelectromechanical Systems, Vol. 16, No. 5, 1106-1112, October 2007