- Author
- Yashar, D. A. | Domanski, P. A. | DeVoe, D. L.
- Title
- Microfabricated Flow Controller for Refrigerant Expansion.
- Coporate
- National Institute of Standards and Technology, Gaithersburg, MD Maryland Univ., College Park
- Journal
- Journal of Microelectromechanical Systems, Vol. 16, No. 5, 1106-1112, October 2007
- Keywords
- refrigerants | valves | expansion | devices | compressed air | computational fluid dynamis | compressing | tests | mass flow | flow rate
- Identifiers
- thick nickel electrodeposition; thermostatic expansion valves (TXVs); microelectromechanical systems (MEMS) processes