- Author
-
Yashar, D. A.
|
Domanski, P. A.
|
DeVoe, D. L.
- Title
- Microfabricated Flow Controller for Refrigerant Expansion.
- Coporate
- National Institute of Standards and Technology, Gaithersburg, MD
Maryland Univ., College Park
- Journal
-
Journal of Microelectromechanical Systems,
Vol. 16,
No. 5,
1106-1112,
October 2007
- Keywords
-
refrigerants
|
valves
|
expansion
|
devices
|
compressed air
|
computational fluid dynamis
|
compressing
|
tests
|
mass flow
|
flow rate
- Identifiers
- thick nickel electrodeposition; thermostatic expansion valves (TXVs); microelectromechanical systems (MEMS) processes