Wu, P. K. S.; Chaffee, J. L.; Peterkin, H.
view article (9.993612)
Fire Hazards of Wafer Carriers in Clean Room Environment.
FM Global Research, USA
Fire and Materials 2003. 8th International Conference. Conference Papers. Proceedings. Organised by Interscience Communications Limited. January 27-28, 2003,
San Francisco, CA,
117-129 p.,
2003